Low energy cluster beam deposition technique: Development and deposition of cluster assembled Sb thin films

نویسندگان

  • G. V. Ravi Prasad
  • B. K. Patel
  • B. R. Sekhar
  • S. N. Sahu
  • V. S. Ramamurthy
  • S. N. Behera
چکیده

Antimony cluster thin films have been synthesized by the newly-developed low energy cluster beam deposition technique. Proton-induced X-ray emission analysis shows absence of any foreign impurity even at ppm level. Structural analysis by glancing angle X-ray diffraction indicates presence of rhombohedral Sb along with Sb-oxides. Transmission electron microscopy micrographs for 20 Å and 100 Å films respectively show the size distribution along with isolated aggregates. The size distribution for 100 Å thick film is found to be large compared to the 20 Å one. Transmission electron diffraction studies reveal hexagonal symmetry.

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تاریخ انتشار 2001